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High-Throughput Prediction and Validation of High-Responsivity Extreme Ultraviolet Detectors Using Machine Learning

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Machine Learning-Assisted Prediction: Unveiling α-MoO3

Introduction

In the rapidly evolving field of materials science, machine learning (ML) is emerging as a game-changer. One of the most exciting applications lies in the prediction of photodetector responsivity, particularly for a candidate material: α-MoO3. This article offers a comprehensive look at the process of developing a machine learning model that significantly improves our understanding of α-MoO3‘s performance and how it stands to impact the future of radiation detection.

Data Aggregation and Feature Engineering

Our machine learning model was built upon a vast dataset, initially reported by A. Tash et al. This expanded repository consists of over 1,927 samples and 23 features, with a target variable—responsivity—ranging from (1.9 \times 10^{-4}) to 239.43 A/W. The dataset includes a plethora of material properties such as valence electrons, atomic number, density, mobility, and bandgaps. Notably, 7 out of the 23 features correspond to specific device configurations like PIN, NIP, PN, Ohmic, Schottky, NN, and FET configurations.

Data was sourced from a multitude of experimental studies focused on photodetector testing across visible, ultraviolet (UV), and even extreme ultraviolet (EUV) ranges. The comprehensive detail included various active layer and substrate properties, including bandgaps and thickness under different conditions (such as varying wavelengths and intensities). Further features were supplemented from both theoretical studies and widely recognized databases, including the Materials Project API and the NIST database.

An important step in our modeling process was feature engineering, achieved through Pearson correlation analysis to identify key variables. This step allowed us to refine our dataset down to 13 distinct features, improving model performance. Device architecture features were deliberately excluded from the correlation-elimination phase to maintain the model’s generalizability.

Regression Algorithms and Model Evaluation

Due to constraints in the dataset—particularly for the EUV range—multiple regression algorithms were applied for cross-spectral response predictions. Our 70:30 training and testing dataset split yielded compelling results, with seven algorithms capturing over 99% of the variance in responsivity. Metrics for model evaluation included mean square error (MSE), root mean square error (RMSE), mean absolute error (MAE), and the coefficient of determination ((R^2)). RMSE was selected as the key performance measure due to its sensitivity to outliers and direct relation to our target variable.

Among all evaluated models, the Extra Trees Regressor (ETR) excelled, achieving an RMSE of 0.27 and (R^2) value of 0.99995 on an unseen test set of approximately 578 samples. The model’s efficacy relies on the contributions of all input features, each significantly aiding in responsivity predictions.

Predicted Values and Material Optimization

Armed with this robust dataset and well-tuned regression model, we endeavored to identify the optimal material for high responsivity. The ETR model predicted favorable outcomes for the total atomic number and material density, identifying α-MoO3 as a leading candidate. Our analysis revealed that the highest predicted responsivity occurred at a bandgap of approximately 3.2 eV, within an optimal thickness range of 150-320 nm.

Through Monte Carlo simulations, we reinforced our predictions by examining electron generation in α-MoO3 compared to silicon under EUV exposure. Results demonstrated that α-MoO3 outperforms silicon by a significant margin, presenting superior electron generation rates across the EUV spectrum, particularly at the critical wavelength of 13.5 nm.

Experimental Validation of the α-MoO3 Detector

Encouraged by the ML predictions, we produced an α-MoO3-based EUV detector to experimentally validate its performance under real-world conditions. Current-time (I-T) measurements illustrated how the detector responded when exposed to EUV radiation. We observed varying photocurrent responses at different photon energies and biases, reinforcing the model’s predictive capability.

Interestingly, as we increased the bias voltage, the photocurrent increased correspondingly, emphasizing the importance of operational parameters in device performance. The steady increase of current with photon flux indicated not only the device’s responsiveness but also its resilience under large exposures, vital for commercial applications.

Performance Metrics and Responsivity Calculations

The success of the α-MoO3-based detector is further measured through its responsivity at various photon energies and bias conditions. Our findings revealed responsivities ranging from approximately 60 to 160 A/W, a significant improvement over traditional silicon-based devices, which commonly exhibit 800 times lower responsivity.

The calculated external quantum efficiency (EQE) at 92 eV surpassed 100,000%, reflecting an extraordinary conversion efficiency from absorbed EUV photons to generated electrical signals. Such metrics position α-MoO3 as a formidable contender in the next generation of high-performance photodetectors.

The Future of Material Discovery with Machine Learning

In summary, this intricate endeavor showcases a highly successful intersection of machine learning and material science. By establishing a predictive framework that facilitates the identification of high-performance materials like α-MoO3, we are paving the way for groundbreaking advancements in detection technologies. With promising experimental validations in hand, the potential for extensive applications across various spectral ranges clearly lies ahead. The robustness of the machine learning model propels future discoveries, making it an indispensable tool for accelerating material innovation in ever-demanding fields.

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